Hardback (01 Feb 2002)
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Out of stock
This text covers microsensors and micromachined microsystems and their applications. The emphasis is on the mechanical ("micromechatronic") structures and micro-electromechanical systems (MEMS). This book addresses a need for information arising from the industrial trend to build smaller and smaller engines and devices. It should interest students, research workers, and practitioners in physics, technology, mechanical engineering, and electrical engineering.
| ISBN: | 9780126722406 |
| Publisher: | Academic Press Inc.,U.S. |
| Imprint: | Academic Press Inc.,U.S. |
| Pub date: | 01 Feb 2002 |
| Number of pages: | 500 |
| Weight: | -1g |
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