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Micromachined Devices and Components VI

Micromachined Devices and Components VI 18-19 September 2000, Santa Clara, USA - SPIE Proceedings Series ; V. 4176

Paperback (15 Aug 2000)

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Book information

ISBN: 9780819438324
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 620.5
DEWEY edition: 21
Language: English
Number of pages: 282
Weight: 688g