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Microlithography

Microlithography Process Technology for IC Fabrication

Book (30 Jun 1986)

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Book information

ISBN: 9780070193048
Publisher: McGraw-Hill
Imprint: McGraw-Hill
Pub date:
DEWEY: 621.38173
DEWEY edition: 19
Language: English
Number of pages: 378
Weight: 680g
Height: 241mm
Width: 158mm
Spine width: 25mm