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Microlithography and Metrology in Micromachining

Microlithography and Metrology in Micromachining 23-24 October, 1995, Austin, Texas - Proceedings / SPIE--the International Society for Optical Engineering

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Book information

ISBN: 9780819420060
Publisher: SPIE
Imprint: SPIE
Pub date:
DEWEY: 621.38152
DEWEY edition: 21
Language: English
Number of pages: 246
Weight: 612g
Height: 273mm
Width: 216mm
Spine width: 19mm