Paperback (31 May 1999)
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A volume of papers on microelectronic structures and MEMS for optical processing. It explores: micromirrors; micro-optical components and microsensors; optomechanical switches; and modulators and microactuators.
| ISBN: | 9780819429728 |
| Publisher: | SPIE |
| Imprint: | SPIE |
| Pub date: | 31 May 1999 |
| DEWEY: | 621.381045 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 240 |
| Weight: | 589g |
| Height: | 230mm |
| Width: | 209mm |
| Spine width: | 12mm |
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