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Microelectromechanical Systems--Materials and Devices II

Microelectromechanical Systems--Materials and Devices II Symposium Held December 1-2, 2008, Boston, Massachusetts, U.S.A - Materials Research Society Symposium Proceedings

Hardback (23 Jun 2009)

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Publisher's Synopsis

Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide market for MEMS is now approximately $10 billion, and the total value of systems enabled by MEMS is several orders of magnitude higher than this figure. As the market has grown, the material and process sets have broadened and departed from their semiconductor roots. In addition to engineering materials, there is now great interest in integrating multifunctional nanomaterials, smart materials and biomaterials within MEMS/NEMS to enhance functionality, performance and reliability. The opportunities created by this integration have generated a vibrant research community working on new materials and processes. This book reflects the breadth of topics currently under investigation in the field. Novel materials and accompanying processes are discussed, as are more conventional materials and processes. Consistent themes are the need for accurate material property assessment at the relevant length scales and for suitable metrology tools to support the introduction of new materials.

About the Publisher

Cambridge University Press

Cambridge University Press dates from 1534 and is part of the University of Cambridge. We further the University's mission by disseminating knowledge in the pursuit of education, learning and research at the highest international levels of excellence.

Book information

ISBN: 9781605111117
Publisher: Cambridge University Press
Imprint: Cambridge University Press
Pub date:
DEWEY: 321.381
DEWEY edition: 22
Language: English
Number of pages: 247
Weight: 520g
Height: 235mm
Width: 157mm
Spine width: 18mm