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Microelectromechanical Systems (MEMS)

Microelectromechanical Systems (MEMS) Microscale Thermal Phenomena in Electronic Systems, Applications of Miocrofabrication to Fluid Mechanics, Mechanics in Micro-Electro-Mechanical Systems (MEMS), Micromechanical Systems : Presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia - DSC

Book (31 Dec 1996)

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Publisher's Synopsis

The proceedings of the International Mechanical Engineering Congress and Exposition held in Atlanta in November, 1996 are divided into the following sections: microscale thermal phenomena in electronic systems, including thermal phenomena in semiconductor devices, thermomechanical sensors and actuators, thermal properties of thin film and interface

Book information

ISBN: 9780791815410
Publisher: American Society of Mechanical Engineers
Imprint: American Society of Mechanical Engineers
Pub date:
DEWEY: 621
DEWEY edition: 21
Language: English
Number of pages: 460
Weight: -1g