Book (30 Apr 1992)
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The 17th International Conference on Microlithography focused on the present dynamic international development of microfabrication using lithography and the related technologies. Bringing together leading international experts in the microcosm of modern semiconductor technology, the 7 invited and 109 contributed papers give an ongoing overview of the latest trends in the fabrication and application of microstructures.
| ISBN: | 9780444895097 |
| Publisher: | Elsevier |
| Imprint: | Elsevier |
| Pub date: | 30 Apr 1992 |
| DEWEY: | 621.3815 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 581 |
| Weight: | -1g |
| Height: | 230mm |
| Width: | 196mm |
| Spine width: | 25mm |
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