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Micro and Nano Fabrication

Micro and Nano Fabrication Tools and Processes

Paperback (06 Oct 2016)

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Publisher's Synopsis

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Book information

ISBN: 9783662508268
Publisher: Springer Berlin Heidelberg
Imprint: Springer
Pub date:
Language: English
Number of pages: 519
Weight: 1115g
Height: 235mm
Width: 155mm
Spine width: 28mm