2015
Hardback (20 Jan 2015)
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
| ISBN: | 9783662443941 |
| Publisher: | Springer Berlin Heidelberg |
| Imprint: | Springer |
| Pub date: | 20 Jan 2015 |
| Edition: | 2015 |
| Language: | English |
| Number of pages: | 519 |
| Weight: | 952g |
| Height: | 240mm |
| Width: | 164mm |
| Spine width: | 31mm |
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