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Micro Electro Mechanical Systems

Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines, and Systems : Proceedings

Hardback (30 Apr 1994)

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Book information

ISBN: 9780780309579
Publisher: Institute of Electrical and Electronics Engineers
Imprint: Institute of Electrical and Electronics Engineers
Pub date:
DEWEY: 620.4
DEWEY edition: 20
Language: English
Number of pages: 294
Weight: 680g
Height: 286mm
Width: 222mm
Spine width: 13mm