Blood in the Machine
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Metrology, Inspection, and Process Control for Microlithography XVII 24-27 February, 2003, Santa Clara, California, USA - SPIE Proceedings Series
Paperback (30 Jun 2003)
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Book information
| ISBN: | 9780819448439 |
| Publisher: | SPIE |
| Imprint: | SPIE |
| Pub date: | 30 Jun 2003 |
| DEWEY: | 621.381531 |
| DEWEY edition: | 22 |
| Language: | English |
| Number of pages: | 1248 |
| Weight: | -1g |
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