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Metrology-Based Control for Micro-Manufacturing

Metrology-Based Control for Micro-Manufacturing 24-25 January 2001, San Jose [Calif.], USA - SPIE Proceedings Series

Paperback (05 Jun 2001)

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    Book information

    ISBN: 9780819439536
    Publisher: SPIE
    Imprint: SPIE
    Pub date:
    DEWEY: 621.381
    DEWEY edition: 21
    Language: English
    Number of pages: 156
    Weight: 394g

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