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Method for Manufacturing Image Sensor Structure Having Wide Contact

Method for Manufacturing Image Sensor Structure Having Wide Contact United States Patent

Paperback (03 Dec 2020)

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Publisher's Synopsis

Methods for forming image sensor structures are provided. The method includes forming an isolation structure in a substrate and forming a first light sensing region and a second light sensing region. The method further includes forming a first gate structure and a second gate structure, and the first gate structure and the second gate structure are positioned at a front side of the substrate. The method further includes forming a first source/drain structure adjacent to the first gate structure and a second source/drain structure adjacent to the second gate structure and forming an interlayer dielectric layer over the front side of the substrate. The method further includes forming a contact trench through the interlayer dielectric layer and forming a contact in the contact trench.

Book information

ISBN: 9798574652763
Publisher: Independently Published
Imprint: Independently Published
Pub date:
Language: English
Number of pages: 26
Weight: 86g
Height: 280mm
Width: 216mm
Spine width: 1mm