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Mems Performance & Reliability

Mems Performance & Reliability

CD-ROM (31 Jan 2000)

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Publisher's Synopsis

This video tutorial focuses on silicon microelectromechanical systems' (MEMS) performance and reliability, how to measure them, and their relationship to design issues. A CD-ROM accompanying the video set includes a bibliography and excerpts from four relevant IEEE conference proceedings.

Book information

ISBN: 9780780362314
Publisher: I.E.E.E.Press
Imprint: I.E.E.E.Press
Pub date:
Language: English
Weight: -1g