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Materials and Device Characterization in Micromachining III

Materials and Device Characterization in Micromachining III 18-19 September 2000, Santa Clara, USA - SPIE Proceedings Series

Paperback (11 Aug 2000)

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    Book information

    ISBN: 9780819438317
    Publisher: SPIE
    Imprint: SPIE
    Pub date:
    DEWEY: 671.35
    DEWEY edition: 21
    Language: English
    Number of pages: 200
    Weight: 496g

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