Book (01 Jan 1999)
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Consisting of the proceedings of a symposium held in December 1998, in Boston, this volume contains nearly 40 contributions addressing a rapidly growing area of microelectronics: the integration of sensors, actuators, and electronics. Eleven contributions address processing and mechanical properties of Si, the mainstay of current MEMS technology; s
| ISBN: | 9781558994522 |
| Publisher: | Materials Research Society |
| Imprint: | Materials Research Society |
| Pub date: | 01 Jan 1999 |
| DEWEY: | 621.381 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 246 |
| Weight: | 566g |
| Height: | 234mm |
| Width: | 158mm |
| Spine width: | 12mm |
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