Publisher's Synopsis
This self–contained handbook deals with the enabling materials technology for the electronics industry. World renowned authors have contributed to this unique treatment of the processing of semiconductors and related technologies.
Contents: Wilkes: Silicon Processing. Mullin: Compound Semiconductor Processing, Kuech/BleLagally/Tischler: Epitaxial Growth. Leuschner/Pawlowski: Photolithography. Griffin: Doping. Turner/Donohoe: Etching Processes in Semiconductor Manufacturing. Chang/Sze: Silicon Device Structures. Lam/Stanchina: Compound Semiconductor Device Structures. Kwong: Silicon Device Processing. Parsey, Jr: Compound Semiconductor Device Processing. Amey: Chip Carriers. Knausenberger/Turlik: Interconnection Systems.
