Hardback (09 Oct 1992)
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Featuring papers from the 1992 MRS Spring Meeting, this volume covers such topics as: reactive ion etching and surface damage; film growth; heteroepitaxy; ion implantation of semiconductors; ion beam processing; ion beam modification of materials.
Cambridge University Press dates from 1534 and is part of the University of Cambridge. We further the University's mission by disseminating knowledge in the pursuit of education, learning and research at the highest international levels of excellence.
| ISBN: | 9781558991637 |
| Publisher: | Materials Research Society |
| Imprint: | Cambridge University Press |
| Pub date: | 09 Oct 1992 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 405 |
| Weight: | 1000g |
| Height: | 234mm |
| Width: | 155mm |
| Spine width: | 30mm |
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