Audio-visual / Multimedia Item (29 May 2014)
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Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production.
| ISBN: | 9783037957424 |
| Publisher: | Trans Tech Publications Ltd |
| Imprint: | Trans Tech Publications |
| Pub date: | 29 May 2014 |
| Language: | English |
| Number of pages: | 128 |
| Weight: | -1g |
| Height: | 142mm |
| Width: | 125mm |
| Spine width: | 10mm |
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