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MOS (Metal Oxide Semiconductor) Physics and Technology

MOS (Metal Oxide Semiconductor) Physics and Technology - Wiley Classics Library

Paperback (13 Dec 2002)

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Publisher's Synopsis

Explains the theoretical and experimental foundations of the measurement of the electrical properties of the MOS system and the technology for controlling its properties. Emphasizes the silica and the silica-silicon interface. Provides a critical assessment of the literature, corrects incomplete or incorrect theoretical formulations, and gives critical comparisons of measurement methods. Contains information needed to grow an oxide, make an MOS capacitor array, and fabricate an integrated circuit with optimal performance and stability.

Book information

ISBN: 9780471430797
Publisher: Wiley
Imprint: Wiley-Interscience
Pub date:
DEWEY: 537.6223
DEWEY edition: 21
Language: English
Number of pages: 906
Weight: 1338g
Height: 238mm
Width: 414mm
Spine width: 57mm