Book (01 Jan 1998)
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The 49 papers focus on the areas of polymeric and inorganic low-k dielectrics, metrology and materials characterization, the process integration of low-k interconnects, and the reliability of low-k dielectrics. Among other topics, the invited papers discuss fundamental aspects of polymer metallization, ion-beam techniques for characterizing low-k m
| ISBN: | 9781558994171 |
| Publisher: | Materials Research Society |
| Imprint: | Materials Research Society |
| Pub date: | 01 Jan 1998 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 386 |
| Weight: | 703g |
| Height: | 241mm |
| Width: | 165mm |
| Spine width: | 25mm |
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