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Laser and Particle-Beam Chemical Processing for Microelectronics

Laser and Particle-Beam Chemical Processing for Microelectronics Symposium Held December 1-3, 1987, Boston, Massachusetts, U.S.A - Materials Research Society Symposium Proceedings

Hardback (01 Apr 1988)

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Cambridge University Press

Cambridge University Press dates from 1534 and is part of the University of Cambridge. We further the University's mission by disseminating knowledge in the pursuit of education, learning and research at the highest international levels of excellence.

Book information

ISBN: 9780931837692
Publisher: Materials Research Society
Imprint: Cambridge University Press
Pub date:
DEWEY: 621.3817
DEWEY edition: 19
Language: English
Number of pages: 509
Weight: 1000g
Height: 233mm
Width: 160mm
Spine width: 38mm