Hardback (20 Nov 1989)
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Symposium held Nov.-Dec. 1988, Boston, MA. Describes work in a variety of areas including: the deposition or etching of metal, semiconductor, and dielectric film by photon-, ion-, electron-, or plasma enhanced processes; the laser-induced physical or chemical modification of surfaces; and, the use of ion or electron beams to affect material propert
Cambridge University Press dates from 1534 and is part of the University of Cambridge. We further the University's mission by disseminating knowledge in the pursuit of education, learning and research at the highest international levels of excellence.
| ISBN: | 9781558990029 |
| Publisher: | Materials Research Society |
| Imprint: | Cambridge University Press |
| Pub date: | 20 Nov 1989 |
| DEWEY: | 620.44 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 649 |
| Weight: | 1000g |
| Height: | 231mm |
| Width: | 165mm |
| Spine width: | 43mm |
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