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Laser Microfabrication: Thin Film Processes and Lithography

Laser Microfabrication: Thin Film Processes and Lithography

Hardback (19 Dec 1989)

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Publisher's Synopsis

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

Book information

ISBN: 9780122334306
Publisher: Elsevier Science
Imprint: Academic Press
Pub date:
DEWEY: 621.366
DEWEY edition: 19
Language: English
Number of pages: 587
Weight: 980g
Height: 229mm
Width: 152mm
Spine width: 43mm