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Laser Chemical Processing for Microelectronics

Laser Chemical Processing for Microelectronics - Cambridge Studies in Modern Optics

Hardback (26 Jan 1989)

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Publisher's Synopsis

This book describes the application of laser processing techniques in the fabrication of semiconductor materials and devices for the microelectronics industry. It comprises a collection of reviews of interest to those involved with a semiconductor fabrication facility.

About the Publisher

Cambridge University Press

Cambridge University Press dates from 1534 and is part of the University of Cambridge. We further the University's mission by disseminating knowledge in the pursuit of education, learning and research at the highest international levels of excellence.

Book information

ISBN: 9780521322546
Publisher: Cambridge University Press
Imprint: Cambridge University Press
Pub date:
DEWEY: 621.38171
DEWEY edition: 19
Language: English
Number of pages: 172
Weight: 398g
Height: 228mm
Width: 152mm
Spine width: 15mm