Hardback (31 Oct 1994)
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Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
| ISBN: | 9783540539254 |
| Publisher: | Springer-Verlag Berlin and Heidelberg GmbH & Co. K |
| Imprint: | Springer-Verlag Berlin and Heidelberg GmbH & Co. K |
| Pub date: | 31 Oct 1994 |
| DEWEY: | 621.366 |
| Language: | English |
| Number of pages: | 250 |
| Weight: | -1g |
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