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Ion Implantation Technology 2008

Ion Implantation Technology 2008 17th International Conference on Ion Implantation Technology, IIT 2008, Monterey, California, 8-13 June 2008 - AIP Conference Proceedings

2009

Hardback (01 Dec 2008)

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Publisher's Synopsis

The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).

Book information

ISBN: 9780735405974
Publisher: American Institute of Physics
Imprint: American Institute of Physics
Pub date:
Edition: 2009
DEWEY: 621.38152
DEWEY edition: 22
Language: English
Number of pages: 556
Weight: 1538g
Height: 279mm
Width: 216mm
Spine width: 36mm