Hardback (30 Nov 1998)
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The aim of this conference was to stimulate and foster discussion of diverse aspects of ion implantation processing from, materials science and device manufacturing to ion beam system design.
| ISBN: | 9780780345386 |
| Publisher: | The Institute of Electrical and Electronics Engineers, Inc. |
| Imprint: | The Institute of Electrical and Electronics Engineers, Inc. |
| Pub date: | 30 Nov 1998 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 22 |
| Language: | English |
| Weight: | -1g |
| Height: | 279mm |
| Width: | 215mm |
| Spine width: | 76mm |
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