Paperback (31 Mar 2002)
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Out of stock
This volume originates from the 2001 International Microprocessors and Nanotechnology Conference and examines computer hardware design and testing. It covers topics including: optical lithography; bio MEMS; Lab on a chip; etching and depostion; and X-ray lithography.
| ISBN: | 9784891140175 |
| Publisher: | I.E.E.E.Press |
| Imprint: | I.E.E.E.Press |
| Pub date: | 31 Mar 2002 |
| DEWEY: | 621.39 |
| Language: | English |
| Number of pages: | 346 |
| Weight: | -1g |
| Height: | 279mm |
| Width: | 216mm |
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