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International Microprocesses and Nanotechnology Conference

International Microprocesses and Nanotechnology Conference

Paperback (30 Sep 2000)

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Publisher's Synopsis

The papers in this volume are the proceedings of the International Microprocesses and Nanotechnology Conference held in 2000. They cover: lithography technology; nanofabrication techniques and nanodevices; microsystem technology; resists and processes; instruments; and more.

Book information

ISBN: 9784891140045
Publisher: I.E.E.E.Press
Imprint: I.E.E.E.Press
Pub date:
DEWEY: 620.5
Language: English
Number of pages: 230
Weight: -1g
Height: 279mm
Width: 216mm
Spine width: 19mm