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Interconnect and Contact Metallization for ULSI

Interconnect and Contact Metallization for ULSI Proceedings of the International Symposium - Proceedings

Book (01 Jan 2000)

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Book information

ISBN: 9781566772549
Publisher: Electrochemical Society
Imprint: Electrochemical Society
Pub date:
DEWEY: 621.395
DEWEY edition: 21
Language: English
Number of pages: 340