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Integrated Processing for Micro- And Optoelectronics

Integrated Processing for Micro- And Optoelectronics Proceedings of Symposium D on Integrated Processing for Micro- And Optoelectronics of the 1993 E-MRS Spring Conference, Strasbourg,France, May 4-7, 1993

Book (31 Oct 1994)

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    Publisher's Synopsis

    These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing and present research results upon which these manufacturing technologies are built.

    Book information

    ISBN: 9780444819833
    Publisher: North-Holland
    Imprint: North-Holland
    Pub date:
    DEWEY: 621.381
    DEWEY edition: 20
    Language: English
    Weight: -1g
    Height: 230mm

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