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IEEE 14th International Micro Electro Mechanical Systems Conference (Mems), 2001

IEEE 14th International Micro Electro Mechanical Systems Conference (Mems), 2001

CD-ROM (31 Jan 2001)

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    Publisher's Synopsis

    This CD-ROM covers topics such as: electrostatic batch assembly of surface MEMS using ultrasonic triboelectricity; progress in silicon etching by in-situ DC microplasmas; the first low voltage, low noise differential silicon microphone, technology and water-powered osmotic microactuator.

    Book information

    ISBN: 9780780362512
    Publisher: I.E.E.E.Press
    Imprint: I.E.E.E.Press
    Pub date:
    Language: English
    Weight: -1g
    Height: 120mm
    Width: 139mm
    Spine width: 6mm

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