Hardback (30 Nov 1998)
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The papers from this international conference cover advances in developments and future directions on all microelectronic test structures and their applications for characterization of device matching, critical dimension, parameter extraction, yield reliability, and interconnection.
| ISBN: | 9780780343481 |
| Publisher: | Institute of Electrical and Electronics Engineers |
| Imprint: | Institute of Electrical and Electronics Engineers |
| Pub date: | 30 Nov 1998 |
| DEWEY: | 621.381548 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 240 |
| Weight: | -1g |
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