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Handbook of Thin Film Process Technology

Handbook of Thin Film Process Technology

Looseleaf In Binder (31 Aug 1995)

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Publisher's Synopsis

This reference covers the most important thin film deposition techniques, as well as aspects of film processing and the major diagnostic techniques for in-process monitoring. It presents deposition system details and process parameters for a range of common materials and processes.

Book information

ISBN: 9780750303118
Publisher: Institute of Physics Publishing
Imprint: Institute of Physics Publishing
Pub date:
DEWEY: 621.38152
Language: English
Number of pages: 160
Weight: 6803g
Height: 297mm
Width: 210mm
Spine width: 127mm