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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions

Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions - Materials Science and Process Technology Series

Hardback (31 Dec 1990)

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Publisher's Synopsis

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Book information

ISBN: 9780815512202
Publisher: Elsevier Science
Imprint: William Andrew
Pub date:
DEWEY: 621.044
DEWEY edition: 19
Language: English
Number of pages: 523
Weight: 860g
Height: 229mm
Width: 152mm
Spine width: 34mm