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Handbook of Microlithography, Micromachining, and Microfabrication

Handbook of Microlithography, Micromachining, and Microfabrication - IEE Materials and Devices Series

Hardback (31 Oct 1999)

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    Publisher's Synopsis

    The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

    Book information

    ISBN: 9780819423788
    Publisher: SPIE Press
    Imprint: SPIE
    Pub date:
    DEWEY: 670
    DEWEY edition: 21
    Language: English
    Number of pages: 768
    Weight: 1532g
    Height: 259mm
    Width: 183mm
    Spine width: 48mm

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