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Handbook of Microlithography, Micromachining, and Microfabrication - The IEE Materials and Devices Series
Hardback (20 Oct 1997)
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Book information
| ISBN: | 9780852969106 |
| Publisher: | Institution of Electrical Engineers |
| Imprint: | Institution of Electrical Engineers |
| Pub date: | 20 Oct 1997 |
| DEWEY: | 621.381531 |
| DEWEY edition: | 21 |
| Number of pages: | 1526 |
| Weight: | 3061g |
| Height: | 254mm |
| Width: | 184mm |
| Spine width: | 88mm |
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