Paperback (30 Mar 1997)
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The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
| ISBN: | 9780819497864 |
| Publisher: | SPIE Press |
| Imprint: | SPIE |
| Pub date: | 30 Mar 1997 |
| Language: | English |
| Number of pages: | 776 |
| Weight: | 1380g |
| Height: | 229mm |
| Width: | 152mm |
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