illustrated Edition
Hardback (31 Dec 1997)
Not available for sale
Out of stock
Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns. Volume Two focuses on the process technology and the device applications using micromachining and microfabrication in su
| ISBN: | 9780819423795 |
| Publisher: | SPIE Press |
| Imprint: | SPIE |
| Pub date: | 31 Dec 1997 |
| Edition: | illustrated Edition |
| DEWEY: | 670 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 692 |
| Weight: | 1464g |
| Height: | 267mm |
| Width: | 190mm |
| Spine width: | 42mm |
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