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Handbook of Microlithography, Micromachining, and Microfabrication. Vol. 2 Micromachining and Microfabrication

Handbook of Microlithography, Micromachining, and Microfabrication. Vol. 2 Micromachining and Microfabrication - IEE Materials and Devices Series

Hardback (20 Oct 1997)

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    Publisher's Synopsis

    This volume concentrates on the process technology and device applications associated with micomachining and microfabrication. The handbook is intended primarily for industrial laboratories, universities and manufacturing facilities.

    Book information

    ISBN: 9780852969113
    Publisher: Institution of Electrical Engineers
    Imprint: Institution of Electrical Engineers
    Pub date:
    DEWEY: 670
    DEWEY edition: 21
    Number of pages: 692
    Weight: 1474g
    Height: 254mm
    Width: 156mm
    Spine width: 44mm

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