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Handbook of Microlithography, Micromachining, and Microfabrication. V. 2 Micromachining and Microfabrication

Handbook of Microlithography, Micromachining, and Microfabrication. V. 2 Micromachining and Microfabrication - Press Monograph S.

Paperback (30 Apr 2006)

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Book information

ISBN: 9780819463630
Publisher: SPIE Society of Photo-Optical Instrumentation Engi
Imprint: SPIE Society of Photo-Optical Instrumentation Engi
Pub date:
DEWEY: 621.381531
Language: English