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Handbook of Microlithography, Micromaching, and Microfabrication

Handbook of Microlithography, Micromaching, and Microfabrication - IEE Materials and Devices Series

Book (31 Mar 1997)

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    Publisher's Synopsis

    Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

    Book information

    ISBN: 9780852969069
    Publisher: SPIE Optical Engineering Press
    Imprint: SPIE Optical Engineering Press
    Pub date:
    DEWEY: 621.3815
    DEWEY edition: 21
    Number of pages: 768
    Weight: 1551g
    Height: 254mm
    Width: 156mm
    Spine width: 48mm

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