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Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis

Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis

Hardback (05 Sep 2000)

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Publisher's Synopsis

Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.

Book information

ISBN: 9780815511991
Publisher: Elsevier Science
Imprint: William Andrew
Pub date:
DEWEY: 621.3817
DEWEY edition: 19
Language: English
Number of pages: 438
Weight: 710g
Height: 234mm
Width: 156mm
Spine width: 25mm