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Handbook of Critical Dimension Metrology and Process Control

Handbook of Critical Dimension Metrology and Process Control - Critical Reviews of Optical Science and Technology

Paperback (30 Jun 2006)

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Publisher's Synopsis

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Book information

ISBN: 9780819413635
Publisher: SPIE Press
Imprint: SPIE
Pub date:
DEWEY: 621.381520287
DEWEY edition: 20
Language: English
Number of pages: 358
Weight: 862g
Height: 267mm
Width: 190mm
Spine width: 27mm