1990
Hardback (30 Nov 1989)
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A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growing surface) designed to elucidate the relationship
| ISBN: | 9780792303091 |
| Publisher: | Springer Netherlands |
| Imprint: | Springer |
| Pub date: | 30 Nov 1989 |
| Edition: | 1990 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 20 |
| Language: | English |
| Number of pages: | 277 |
| Weight: | 586g |
| Height: | 234mm |
| Width: | 156mm |
| Spine width: | 17mm |
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