Book (24 May 2000)
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Contains papers from a January 1999 conference held in San Jose, California, describing concepts and metrology of Gate Dielectric Integrity (GDI) and discussing its applications for material and device processes and tool qualification. Topics include methods, protocols, and reliability assessment as related to dielectric integrity. Papers are organ
| ISBN: | 9780803126152 |
| Publisher: | ASTM |
| Imprint: | ASTM |
| Pub date: | 24 May 2000 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 169 |
| Weight: | 272g |
| Height: | 222mm |
| Width: | 152mm |
| Spine width: | 12mm |
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