Book (01 Jan 1998)
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The first symposium on electron microscopy and materials for ultra-large scale integration (ULSI) at the Society's meeting attracted 34 papers by contributors from Asia, North America, and Europe. They cover specimen preparation and defect analysis in semiconductor devices; metallization, silicides, and diffusion barriers; the advanced characteriza
| ISBN: | 9781558994294 |
| Publisher: | Materials Research Society |
| Imprint: | Materials Research Society |
| Pub date: | 01 Jan 1998 |
| DEWEY: | 621.38152 |
| DEWEY edition: | 21 |
| Language: | English |
| Number of pages: | 270 |
| Weight: | 589g |
| Height: | 241mm |
| Width: | 165mm |
| Spine width: | 19mm |
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