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Dry Etching for Microelectronics

Dry Etching for Microelectronics - Materials Processing _ Theory and Practices

Book (01 Jan 1984)

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Book information

ISBN: 9780444869050
Publisher: North-Holland Physics
Imprint: North-Holland Physics
Pub date:
DEWEY: 621.38173
DEWEY edition: 19
Language: English
Number of pages: 299
Weight: -1g